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ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589
FEATURES
q Ultra Thin Type: 2.5 mm (Max.) * Detection at closed distance from samples q Flexible Lead Out (polymide film) * Easy system design with a flexible wiring * Low outguessing for high vacuum operation q Light Weight
APPLICATIONS
q SEM q FIB System q Mask Aligner q Electron Beam Measuring System
TMCPF0083
SPECIFICATIONS
Parameter Value Unit
GENERAL
Assembly Outer Diameter Effective Diameter Maximum Height MCP Channel Diameter MCP Stage Number Centerpipe Inner Diameter Dead Area around Center Hole Electrical Potential MCP-in Anode 28.0 11.0 2.5 12 2 1 4 -0.4 to +0.4 +2.4 (Max.) mm mm mm m stage mm mm kV
MAXIMUM RATINGS
MCP Supply Voltage (In-Out) MCP Out-Anode Voltage Anode-Substrate Voltage Operating Vacuum Condition Ambient Temperature Baking Temperature Baking Time Vacuum Condition for Baking * Not allowed to be baked. 2.0 0.4 2.4 Less than 6.7 x 10 -4 (5 x 10 -6) -50 to +70 200 8 Less than 6.7 x 10 -4 (5 x 10 -6) kV kV kV Pa (Torr) C C hours Pa (Torr)
CHARACTERISTICS
Gain at 1.8kV Plate Resistance Maximum Linear Output DC Dark Current at 2kV Dark Count at 2kV 1 x 10 6 Min. 50 to 200 7% of strip current under uniform input into whole MCP effective area 1 x 10 -10 3 - M/MCP A A cps
Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. (c) 1997 Hamamatsu Photonics K. K.
ULTRA THIN MCP ASSEMBLY WITH CENTER HOLE F6589
Figure 1: Merit of Ultra Thin MCP Assembly with Center Hole ULTRA THIN TYPE
Electron
CONVENTIONAL TYPE
Electron
MCP Secondary Electrons MCP Secondary Electrons Stage Sample Sample Stage
Detection efficiency of secondary Electrons is improved with a closed distance from sample.
TMCPC0039EA
Figure 2: Dimensional Outline (Unit: mm)
ANODE LEAD MCP-OUT LEAD 8
MCP-IN LEAD
o2.2 o4 o6
10 POLYIMIDE FILM (Less Than 0.1t) ELECTRODE : COPPER
63
SUBSTRATE (TITANIUM)
58
MCP (2 STAGE)
HAMAMATSU PHOTONICS K.K., Electron Tube Center 314-5, Shimokanzo, Toyooka-village, Iwata-gun, Shizuoka-ken, 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205
U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658 France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 United Kingdom: Hamamatsu Photonics UK Limited: Lough Point, 2 Gladbeck Way, Windmill Hill, Enfield, Middlesex EN2 7JA, United Kingdom, Telephone: (44)181-367-3560, Fax: (44)181-367-6384 North Europe: Hamamatsu Photonics Norden AB: Farogatan 7, S-164-40 Kista, Sweden, Telephone: (46)8-703-29-50, Fax: (46)8-750-58-95 Italy: Hamamatsu Photonics Italia S.R.L.: Via Della Moia, 1/E 20020 Arese, (Milano), Italy, Telephone: (39)2-935 81 733, Fax: (39)2-935 81 741 TMCP1011E03

o1 o11 o18 o28
EFFECTIVE AREA PROTECTION ELECTRODE FOR CHARGING-UP (SAME POTENTIAL AS SUBSTRATE)
2.5 MAX.
,
SUBSTRATE ANODE (SUS-NM)
, , , ,
TMCPA0031EA
MAR. 1998. CR (9705) Printed in Japan

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